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Non Contact Flatness measurement Interferometer also called Fizeau Interferometer for inspection of flatness of optical or mechanical parts. Many Mechanical seal manufacturer use this Interferometer for evaluation of flatness. In Automobile parts many flat surfaces require inspection of flatness in light bands. Monochromatic Light source and use of Optical Flat is replaced with Fizeau Interferometer.
Interferometer is shown in Figure 1 (The basic layout of a Fizeau Autocollimator). A laser source is spatial y filtered via a microscope objective. This microscope objective is located at the focal point of a collimating lens. Between the microscope objective and lens is a cube beam-splitter. The collimated beam encounters a slightly wedged glass plate. This is the heart of the interferometer. The surface adjacent to the collimating lens is of good optical quality.
However, the next surface is of exceptional optical quality, λ/20 peak to valley (PV) or better. This is the reference surface and part of the collimated beam is reflected by this surface. Part of the collimated beam continues on to interrogate the component being tested. The return beam contains information on aberration introduced by the test surface. The two wave fronts recombine inside the interferometer.
The cube beam-splitter diverts the combined beam towards a recording medium, either film or a CCD. An intermediate lens forms an image of the test surface onto the recording plane.